JPS58140403U - 空気マイクロメ−タ - Google Patents

空気マイクロメ−タ

Info

Publication number
JPS58140403U
JPS58140403U JP3720982U JP3720982U JPS58140403U JP S58140403 U JPS58140403 U JP S58140403U JP 3720982 U JP3720982 U JP 3720982U JP 3720982 U JP3720982 U JP 3720982U JP S58140403 U JPS58140403 U JP S58140403U
Authority
JP
Japan
Prior art keywords
pressure
air
air supply
supply pipe
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3720982U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0449527Y2 (en]
Inventor
道雄 角田
深沢　俊夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NSK Ltd
Original Assignee
NSK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NSK Ltd filed Critical NSK Ltd
Priority to JP3720982U priority Critical patent/JPS58140403U/ja
Publication of JPS58140403U publication Critical patent/JPS58140403U/ja
Application granted granted Critical
Publication of JPH0449527Y2 publication Critical patent/JPH0449527Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)
JP3720982U 1982-03-18 1982-03-18 空気マイクロメ−タ Granted JPS58140403U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3720982U JPS58140403U (ja) 1982-03-18 1982-03-18 空気マイクロメ−タ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3720982U JPS58140403U (ja) 1982-03-18 1982-03-18 空気マイクロメ−タ

Publications (2)

Publication Number Publication Date
JPS58140403U true JPS58140403U (ja) 1983-09-21
JPH0449527Y2 JPH0449527Y2 (en]) 1992-11-20

Family

ID=30048607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3720982U Granted JPS58140403U (ja) 1982-03-18 1982-03-18 空気マイクロメ−タ

Country Status (1)

Country Link
JP (1) JPS58140403U (en])

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05254693A (ja) * 1991-05-01 1993-10-05 Ibaraki Pref Gov 紙葉類の重送検出装置
JP2003007653A (ja) * 2001-06-26 2003-01-10 Disco Abrasive Syst Ltd 半導体ウェーハの分割システム及び分割方法
JP2003017442A (ja) * 2001-06-28 2003-01-17 Disco Abrasive Syst Ltd 半導体ウェーハの分割システム及び分割方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55165209U (en]) * 1979-05-16 1980-11-27

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55165209U (en]) * 1979-05-16 1980-11-27

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05254693A (ja) * 1991-05-01 1993-10-05 Ibaraki Pref Gov 紙葉類の重送検出装置
JP2003007653A (ja) * 2001-06-26 2003-01-10 Disco Abrasive Syst Ltd 半導体ウェーハの分割システム及び分割方法
JP2003017442A (ja) * 2001-06-28 2003-01-17 Disco Abrasive Syst Ltd 半導体ウェーハの分割システム及び分割方法

Also Published As

Publication number Publication date
JPH0449527Y2 (en]) 1992-11-20

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